3D MEMS simulator using CSuprem
3D process analysis tool for MEMS using CSuprem
CSuprem is a simulator that can immediately create MEMS (Micro-Electro-Mechanical Systems). It illustrates actual calculations using process simulations of RF switches, electrometers, polysilicon MEMS, SOI MEMS, and MT-VCSOA. It accurately optimizes the MEMS manufacturing process and generates the optimal 3D mesh for MEMS formation simulations.
- 企業:クロスライトソフトウェアインク日本支社
- 価格:Other